Characteristics of Carbon Tetrafluoride Plasma Resistance of Various Glasses
Jae Ho Choi, Yoon Soo Han, Sung Min Lee, Hyung Bin Park, Sung Churl Choi, Hyeong Jun Kim
J. Korean Ceram. Soc. 2016;53(6):700-706. Published online 2016 Nov 30 DOI: https://doi.org/10.4191/kcers.2016.53.6.700
|
Citations to this article as recorded by
Plasma resistant glass (PRG) for reducing particulate contamination during plasma etching in semiconductor manufacturing: A review
Jae Ho Choi, Won Bin Im, Hyeong-Jun Kim
Materials Today Communications.2023; 34: 105267. CrossRef Enhancing the Plasma-Resistance Properties of Li2O–Al2O3–SiO2 Glasses for the Semiconductor Etch Process via Alkaline Earth Oxide Incorporation
So-Won Kim, Hwan-Seok Lee, Deok-Sung Jun, Seong-Eui Lee, Joung-Ho Lee, Hee-Chul Lee
Materials.2023; 16(14): 5112. CrossRef Additive, subtractive and formative manufacturing of glass-based functional micro/nanostructures: A comprehensive review
Hong Luo, Yingying Zhang, Jianwu Yu, Xinran Dong, Tianfeng Zhou
Materials & Design.2023; 233: 112285. CrossRef Effect of CaF2 on fluorocarbon plasma resistance and thermal properties of CaO-Al2O3-SiO2 glasses
Jewon Park, Jae Ho Choi, Hyein Na, Hyeong-Jun Kim
Journal of Asian Ceramic Societies.2021; 9(1): 334. CrossRef Divalent ion mixed effect of calcium aluminosilicate glasses (CAS) on thermal properties and fluorocarbon plasma resistance
Jewon Park, Hyein Na, Jae-Hyuk Park, Dae-Gun Kim, Sung-Churl Choi, Hyeong-Jun Kim
Journal of Non-Crystalline Solids.2020; 533: 119897. CrossRef Plasma corrosion resistance of RO-Al2O3-SiO2 (R: Alkaline earth) under fluorocarbon plasma with Ar+: Ⅱ. Plasma resistant glass
Jae Ho Choi, Hyung Bin Park, Hyein Na, Hyeong-Jun Kim
Corrosion Science.2019; 146: 247. CrossRef Plasma corrosion resistance of aluminosilicate glasses containing Ca, Y and B under fluorocarbon plasma with Ar+
Jae Ho Choi, Hyein Na, Jewon Park, Hyeong-Jun Kim
Journal of Non-Crystalline Solids.2019; 521: 119498. CrossRef
|