Characteristics of Carbon Tetrafluoride Plasma Resistance of Various Glasses
Jae Ho Choi, Yoon Soo Han, Sung Min Lee, Hyung Bin Park, Sung Churl Choi, Hyeong Jun Kim
J. Korean Ceram. Soc. 2016;53(6):700-706.   Published online 2016 Nov 30     DOI: https://doi.org/10.4191/kcers.2016.53.6.700
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