Chemical Vapor Deposition of Tantalum Carbide from TaCl5-C3H6-Ar-H2 System
Daejong Kim, Sang Min Jeong, Soon Gil Yoon, Chang Hyun Woo, Joung Il Kim, Hyun-Geun Lee, Ji Yeon Park, Weon-Ju Kim
J. Korean Ceram. Soc. 2016;53(6):597-603. Published online 2016 Nov 30 DOI: https://doi.org/10.4191/kcers.2016.53.6.597
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