Effect of Inductively Coupled Plasma (ICP) Power on the Properties of Ultra Hard Nanocrystalline TiN Coatings
Sung-Yong Chun
J. Korean Ceram. Soc. 2013;50(3):212 DOI: https://doi.org/10.4191/kcers.2013.50.3.212
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Citations to this article as recorded by
Properties of VN Coatings Deposited by ICP Assisted Sputtering: Effect of ICP Power
Sung-Yong Chun
Journal of the Korean Ceramic Society.2017; 54(1): 38. CrossRef A Comparative Study of Nanocrystalline TiAlN Coatings Fabricated by Direct Current and Inductively Coupled Plasma Assisted Magnetron Sputtering
Sung-Yong Chun, Se-Chul Kim
Journal of the Korean Ceramic Society.2014; 51(5): 375. CrossRef
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