Growing Behavior of Nanocrystalline TiN Films by Asymmetric Pulsed DC Reactive Magnetron Sputtering
Man-Geun Han, Sung-Yong Chun
J. Korean Ceram. Soc. 2011;48(5):342     DOI: https://doi.org/10.4191/kcers.2011.48.5.342
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