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Fabrication of a (100) Silicon Master Using Anisotropic Wet Etching for Embossing
Yu-Min Jung, Yeong-Cheol Kim
J. Korean Ceram. Soc. 2005;42(10):645 DOI: https://doi.org/10.4191/kcers.2005.42.10.645
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Anisotropic Wet-Etching Process of Si Substrate for Formation of Thermal Vias in High-Power LED Packages
B.K. Yu, M.Y. Kim, T.S. Oh
Journal of the Microelectronics and Packaging Society.2012; 19(4): 51. CrossRef
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