Electrical Properties of Sputtered Gallium-doped Zinc Oxide Films Deposited Using Ne, Ar, or Kr Gas
Pung-Keun Song, Bong-Ki Ryu, Kwang-Ho Kim
J. Korean Ceram. Soc. 2002;39(10):935 DOI: https://doi.org/10.4191/kcers.2002.39.10.935
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