The Fabrication of ITO Thin-film O3 Gas Sensors Using R.F. Magnetron Sputtering Method and their Characterization
Jung-Bum Kwon, Kyoung-Keun Jung, Dong-Su Lee, Jo-Woong Ha, Kwang-Soo Yoo
J. Korean Ceram. Soc. 2002;39(9):840     DOI: https://doi.org/10.4191/kcers.2002.39.9.840
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