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The Effect of Slurry and Wafer Morphology on the SiC Wafer Surface Quality in CMP Process
Jong-Hwi Park, Woo-Sung Yang, Jung-Young Jung, Sang-Il Lee, Mi-Seon Park, Won-Jae Lee, Jae-Yuk Kim, Sang-Don Lee, Ji-Hye Kim
J. Korean Ceram. Soc. 2011;48(4):312
DOI: https://doi.org/10.4191/kcers.2011.48.4.312
      
Al2TiO5-machinable Ceramics Made by Reactive Sintering of Al2O3 and TiO2
Jae-Hyun Park, Won-Jae Lee, Il-Soo Kim
J. Korean Ceram. Soc. 2010;47(6):498
DOI: https://doi.org/10.4191/kcers.2010.47.6.498
         Cited By 4
Integration of Ba0.5Sr0.5TiO3Epitaxial Thin Films on Si Substrates and their Dielectric Properties
Eun-Mi Kim, Jong-Ha Moon, Won-Jae Lee, Jin-Hyeok Kim
J. Korean Ceram. Soc. 2006;43(6):362
DOI: https://doi.org/10.4191/kcers.2006.43.6.362
      
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