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Initial Reaction of Hexachlorodisilane on Amorphous Silica Surface for Atomic Layer Deposition Using Density Functional Theory
Ki-Young Kim, Jin-Hoon Yang, Dong-Gung Shin, Yeong-Cheol Kim
J. Korean Ceram. Soc.
2017;54(5):443-447. Published online September 29, 2017
DOI:
https://doi.org/10.4191/kcers.2017.54.5.11
Cited By 6
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5