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Effect of Total Reaction Pressure on the Microstructure of the SiC Deposited Layers by Low Pressure Chemical Vapor Deposition
박지연, 이민용, 김원주, 김정일, 홍계원, 윤순길
J. Korean Ceram. Soc. 2001;38(4):388
      
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Materials Science, Ceramics - Q1
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