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Refractive Index Control of Silicon Oxynitride Thick Films on Core Layer of Silica Optical Waveguide
김용탁, 조성민, 윤석규, 서용곤, 임영민, 윤대호
J. Korean Ceram. Soc. 2002;39(6):594
DOI: https://doi.org/10.4191/kcers.2002.39.6.594
      
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