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Effect of O2 Partial Pressure on AlOx Thin Films Prepared by Reactive Ion Beam Sputtering Deposition
Jin-Wook Seong, Ki-Hyun Yoon, Ki-Hwan Kim, Young-Whoan Beag, Seok-Keun Koh
J. Korean Ceram. Soc. 2004;41(5):364
DOI: https://doi.org/10.4191/kcers.2004.41.5.364
      
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