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Properties of VN Coatings Deposited by ICP Assisted Sputtering: Effect of ICP Power
Sung-Yong Chun
J. Korean Ceram. Soc. 2017;54(1):38-42.   Published online January 31, 2017
DOI: https://doi.org/10.4191/kcers.2017.54.1.05
                           Cited By 6
A Comparative Study of Nanocrystalline TiAlN Coatings Fabricated by Direct Current and Inductively Coupled Plasma Assisted Magnetron Sputtering
Sung-Yong Chun, Se-Chul Kim
J. Korean Ceram. Soc. 2014;51(5):375
DOI: https://doi.org/10.4191/kcers.2014.51.5.375
         Cited By 1
Effect of Inductively Coupled Plasma (ICP) Power on the Properties of Ultra Hard Nanocrystalline TiN Coatings
Sung-Yong Chun
J. Korean Ceram. Soc. 2013;50(3):212
DOI: https://doi.org/10.4191/kcers.2013.50.3.212
         Cited By 2
Growth Behavior of Nanocrystalline CrN Coatings by Inductively Coupled Plasma (ICP) Assisted Magnetron Sputtering
Dae-Han Seo, Sung-Yong Chun
J. Korean Ceram. Soc. 2012;49(6):556
DOI: https://doi.org/10.4191/kcers.2012.49.6.556
         Cited By 3
Characterization of Deep Dry Etching of Silicon Single Crystal by HDP
박우정, 김장현, 김용탁, 백형기, 서수정, 윤대호
J. Korean Ceram. Soc. 2002;39(6):570
DOI: https://doi.org/10.4191/kcers.2002.39.6.570
         Cited By 1
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