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Journal of the Korean Ceramic Society
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Properties of VN Coatings Deposited by ICP Assisted Sputtering: Effect of ICP Power
Sung-Yong Chun
J. Korean Ceram. Soc.
2017;54(1):38-42. Published online January 31, 2017
DOI:
https://doi.org/10.4191/kcers.2017.54.1.05
Cited By 6
A Comparative Study of Nanocrystalline TiAlN Coatings Fabricated by Direct Current and
Inductively Coupled Plasma
Assisted Magnetron Sputtering
Sung-Yong Chun, Se-Chul Kim
J. Korean Ceram. Soc.
2014;51(5):375
DOI:
https://doi.org/10.4191/kcers.2014.51.5.375
Cited By 1
Effect of
Inductively Coupled Plasma
(ICP) Power on the Properties of Ultra Hard Nanocrystalline TiN Coatings
Sung-Yong Chun
J. Korean Ceram. Soc.
2013;50(3):212
DOI:
https://doi.org/10.4191/kcers.2013.50.3.212
Cited By 2
Growth Behavior of Nanocrystalline CrN Coatings by
Inductively Coupled Plasma
(ICP) Assisted Magnetron Sputtering
Dae-Han Seo, Sung-Yong Chun
J. Korean Ceram. Soc.
2012;49(6):556
DOI:
https://doi.org/10.4191/kcers.2012.49.6.556
Cited By 3
Characterization of Deep Dry Etching of Silicon Single Crystal by HDP
박우정, 김장현, 김용탁, 백형기, 서수정, 윤대호
J. Korean Ceram. Soc.
2002;39(6):570
DOI:
https://doi.org/10.4191/kcers.2002.39.6.570
Cited By 1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5