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Computer Simulation of Mo/Si Thin Film Characteristics for
EUVL
Technology
Young-Tae Lee, Yong-Chae Chung
J. Korean Ceram. Soc.
2002;39(8):807
DOI:
https://doi.org/10.4191/kcers.2002.39.8.807
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.7