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Plasma‑resistant characteristics according to sintering conditions of CaO–Al
2
O
3
–SiO
2
glass coating layer
Yoon Sung Jung, Kyung Won Min, Jae Ho Choi, Ji Sob Yoon, Won Bin Im, Hyeong-Jun Kim
J. Korean Ceram. Soc.
2022;59(1):86-93. Published online January 31, 2022
DOI:
https://doi.org/10.1007/s43207-021-00149-x
Cited By 2
Engineering Ceramics
Characteristics of Carbon Tetrafluoride Plasma Resistance of Various Glasses
Jae Ho Choi, Yoon Soo Han, Sung Min Lee, Hyung Bin Park, Sung Churl Choi, Hyeong Jun Kim
J. Korean Ceram. Soc.
2016;53(6):700-706. Published online November 30, 2016
DOI:
https://doi.org/10.4191/kcers.2016.53.6.700
Cited By 7
Surface Morphology and Characteristics of LiNbO
3
Single Crystal by Helicon Wave Plasma Etching
박우정, 양우석, 이한영, 윤대호
J. Korean Ceram. Soc.
2003;40(9):886
DOI:
https://doi.org/10.4191/kcers.2003.40.9.886
Characterization of Deep
Dry Etching
of Silicon Single Crystal by HDP
박우정, 김장현, 김용탁, 백형기, 서수정, 윤대호
J. Korean Ceram. Soc.
2002;39(6):570
DOI:
https://doi.org/10.4191/kcers.2002.39.6.570
Cited By 1
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5
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