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Electrical Properties of DC Sputtered Titanium Nitride Films with Different Processing Conditions and Substrates
Yen Jin, Young-Gu Kim, Jong-Ho Kim, Do-Kyung Kim
J. Korean Ceram. Soc. 2005;42(7):455
DOI: https://doi.org/10.4191/kcers.2005.42.7.455
         Cited By 3
Electrical and Optical Properties of ZnO : Al Films Prepared by the DC Magnetron Sputtering System
김의수, 유세웅, 유병석, 이정훈
J. Korean Ceram. Soc. 1995;32(7):799
      
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