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Microstructure Control of Tungsten Film for Bragg Reflectors of Thin Film Bulk Acoustic Wave Resonators
강성철, 이시형, 박종완, 이전국
J. Korean Ceram. Soc. 2003;40(3):268
DOI: https://doi.org/10.4191/kcers.2003.40.3.268
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