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Preparation of Si(Al)ON Precursor Using Organoaluminum Imine and Poly (Phenyl Carbosilane), and the Compositional Change of the Film with Different Heat Treatment Condition
Yoonjoo Lee, Dong-Geun Shin, Woo Teck Kwon, Soo Ryong Kim, Younghee Kim
J. Korean Ceram. Soc. 2015;52(4):243
DOI: https://doi.org/10.4191/kcers.2015.52.4.243
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