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Journal of the Korean Ceramic Society
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Deposition of
3C-SiC Films
by Plasma-enhanced Chemical Vapor Deposition (I): Deposition Behaviors of SiC with Deposition Parameters
김광호, 서지윤, 윤석영
J. Korean Ceram. Soc.
2001;38(6):531
Deposition of
3C-SiC Films
by Plasma-enhanced Chemical Vapor Deposition (II): Mechanical Properties of SiC Films by Nanoindentation Technique
김광호, 윤석영, 서지윤, 김창열, Koichi Niihara
J. Korean Ceram. Soc.
2001;38(4):365
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5