| 압전 PMN-PZT 단결정의 유전 및 압전 특성에 미치는 전극 종류의 영향 |
| 이종엽, 오현택, 최균1, 이호용2 |
(주)세라콤 연구개발부
1한국세라믹기술원 이천분원
2선문대학교 신소재공학과 |
| Effect of the Electrode Type on the Dielectric and Piezoelectric Properties of Piezoelectric PMN-PZT Single Crystals |
| Jong-Yeb Lee, Hyun-Taek Oh, Kyoon Choi1, Ho-Yong Lee2 |
R & D Center, Ceracomp Co., Ltd.
1Icheon Brach, Korea Institute of Ceramic Engineering & Technology
2Department of Materials Science and Engineering, Sunmoon University |
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| ABSTRACT |
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The effect of the electrode type on the dielectric and piezoelectric properties of $Pb(Mg_{1/3}Nb_{2/3})O_3-PbZrO_3-PbTiO_3$ (PMN-PZT) single crystals was investigated in an effort to improve their properties for various piezoelectric applications. First, three different types of PMN-PZT single crystals [PMN-PZT-A (piezoelectrically soft type; dielectric constant ~ 10,000), PMN-PZT-B (piezoelectrically soft type; phase-transition temperature between the rhombohedral and tetragonal phases ($T_{RT}$) ~ $145^{circ}C$), PMN-PZT-C (piezoelectrically hard type; high mechanical quality factor ($Q_m$) ~ 1,000)] were fabricated using the solid-state single crystal growth (SSCG) method. Then, four different types of electrodes [sputtered Au, sputtered Cr/Au, sputtered Ti/Au, and fired Ag] were formed on the single crystals, and their dielectric and piezoelectric properties were measured. The single crystals with a sputtered Ti/Au electrode showed the highest dielectric and piezoelectric constants but the lowest coercive electric field ($E_C$). The single crystals with a fired Ag electrode showed the lowest dielectric and piezoelectric constants but the highest coercive electric field ($E_C$). This dependence on the type of electrode was most significant in the piezoelectrically hard PMN-PZT-C single crystals. However, the effects of the electrode type on the phase transition temperatures ($T_C$, $T_{RT}$) and dielectric loss were negligible. These results clearly demonstrate that it is important to select an appropriate electrode so as to maximize the dielectric and piezoelectric properties of single crystals in each type of piezoelectric application. |
| Key words:
Electrode, PMN-PZT, Single crystals, Piezoelectric, Dielectric |
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