| Y2O3-AlN 세라믹스의 생성상 및 물성에 미치는 WO3 및 Ga2O3의 첨가효과 |
| 신현호, 윤상옥, 김신, 황인준 |
| 강릉원주대학교 세라믹신소재공학과 |
| Effect of WO3 or Ga2O3 Addition on the Phase Evolution and Properties of Y2O3-Doped AlN Ceramics |
| Hyunho Shin, Sang-Ok Yoon, Shin Kim, Injoon Hwang |
| Department of Advanced Ceramic Materials Engineering, Gangneung-Wonju National University |
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| ABSTRACT |
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The effect of a $WO_3$ or $Ga_2O_3$ addition on the densification, phase evolution, optical reflectance, and elastic and dielectric properties of $Y_2O_3$-doped AlN ceramics sintered at $1800^{circ}C$ for 3 h is investigated. The investigated compositions of the additives are 4.5 wt% $Y_2O_3$ (YA), 3.5 wt% $Y_2O_3$-1.0 wt% $Ga_2O_3$ (YGA), and 3.5 wt% $Y_2O_3$-1.0 wt% $WO_3$ (YWA). $YAlO_3$ and $Y_4Al_2O_9$ form as the secondary phases in all of the investigated compositions, whereas $W_2B$ appears additionally in the YWA. In the YGA, Ga is detected in the AlN grains, indicating that the dissolution of $Ga_2O_3$ into the AlN lattice occurs. The addition of $WO_3$ blackens the specimen more significantly than that of $Ga_2O_3$ does. In all of the investigated specimens, the linear shrinkage and the apparent density are above 20 percent and in the range of 3.34-3.37 $g/cm^3$, respectively. The elastic modulus, Poisson's ratio, the dielectric constant, and the dielectric loss are in the ranges of 335-368 GPa, 0.146-0.237, 8.60-8.63, $2.65-3.95{times}10^{-3}$, respectively. The sinterability and the properties of $Y_2O_3$-doped AlN ceramics are not much altered by the addition of $WO_3$ or $Ga_2O_3$. |
| Key words:
AlN, $WO_3$, $Ga_2O_3$, Phase evolution, Elastic property, Dielectric property |
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