| 전자빔 물리증착을 이용한 고체 산화물 연료전지의 제조 : I. YSZ 박막 전해질의 제조 |
| 김형철, 구명서, 박종구, 정화영, 김주선, 이해원, 이종호 |
| 한국과학기술연구원 나노재료연구센터 |
| Fabrication of Solid Oxide Fuel Cells with Electron Beam Physical Vapor Deposition: I. Preparation of Thin Electrolyte Film of YSZ |
| Hyoungchul Kim, Myeong-Seo Koo, Jong-Ku Park, Hwa-Young Jung, Joosun Kim, Hae-Weon Lee, Jong-Ho Lee |
| Nano-Materials Research Center, Korea Institute of Science and Technology |
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| ABSTRACT |
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Electron Beam Physical Vapor Deposition (EB-PVD) was applied to fabricate a thin film YSZ electrolyte with large area on the porous NiO-YSZ anode substrate. Microstructural and thermal stability of the as-deposited electrolyte film was investigated via SEM and XRD analysis. In order to obtain an optimized YSZ film with high stability, both temperature and surface roughness of substrate were varied. A structurally homogeneous YSZ film with large area of $12times12;cm^2$ and high thermal stability up to $900^{circ}C$ was fabricated at the substrate temperature of $T_s/T_m$ higher than 0.4. The smoother surface was proved to give the better film quality. Precise control of heating and cooling rate of the anode substrate was necessary to obtain a very dense YSZ electrolyte with high thermal stability, which affords to survive after post heat treatment for fabrication a cathode layer on it as well as after long time operation of solid oxide fuel cell at high temperature. |
| Key words:
Solid oxide fuel cell, Electron beam physical vapor deposition, Solid electrolyte film, Columnar structure |
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