| 직충돌 이온산란 분광법을 사용한 MgO(100) 면에 성장된 BaTiO3막의 구조해석 |
| 황연, 이태근 |
| 서울산업대학교 신소재공학과 |
| Structure Analysis of BaTiO3 Film on the MgO(100) Surface by Impact-Collision Ion Scattering Spectroscopy |
| Yeon Hwang, Tae-Kun Lee |
| Department of Materials Science and Engineering, Seoul National University of Technology |
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| ABSTRACT |
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Time-of-flight impact-collision ion scattering spectroscopy (TOF-ICISS) using 2 keV $He^+$ ion was applied to study the geometrical structure of the $BaTiO_3$ thin film which was grown on the MgO(100) surface. Hetero-epitaxial $BaTiO_3$ layers were formed on the MgO(100) surface by thermal evaporation of titanium followed first by oxidation at $400^{circ}C$, subsequently by barium evaporation, and finally by annealing at $800^{circ}C$. The atomic structure of $BaTiO_3$ layers was investigated by the scattering intensity variation of $He^+$ ions on TOF-ICISS and by the patterns of reflection high energy electron diffraction. The scattered ion intensity was measured along the <001> and <011> azimuth varying the incident angle. Our investigation revealed that perovskite structured $BaTiO_3$ layers were grown with a larger lattice parameter than that of the bulk phase on the MgO(100) surface. |
| Key words:
Atomic structure analysis, Impact-collision ion scattering spectroscopy, Time-of-flight |
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