| 전고상 리튬 박막 전지 구현을 위해 펄스 레이저 증착법으로 LiCoO2 정극위에 성장시킨 비정질 (Li, La)TiO3고체 전해질의 특성 |
| 안준구, 윤순길 |
| 충남대학교 재료공학과 |
| Amorphous Lithium Lanthanum Titanate Solid Electrolyte Grown on LiCoO2 Cathode by Pulsed Laser Deposition for All-Solid-State Lithium Thin Film Microbattery |
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| ABSTRACT |
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To make the all-solid-state lithium thin film battery having less than 1 fm in thickness, LiCoO$_2$ thin films were deposited on Pt/TiO$_2$/SiO$_2$/Si substrate as a function of Li/Co mole ratio and the deposition temperature by Pulsed Laser Deposition (PLD). Especially, LiCoO$_2$ thin films deposited at 50$0^{circ}C$ with target of Li/Co=1.2 mole ratio show an initial discharge capacity of 53 $mu$Ah/cm$^2$-$mu$m and capacity retention of 67.6％. The microstructural and electrochemical properies of (Li, La)TiO3 thin films grown on LiCoO$_2$Pt/TiO$_2$/SiO$_2$/Si structures by Pulsed Laser Deposition (PLD) were investigated at various deposition temperatures. The thin films grown at 10$0^{circ}C$ show an initial discharge capacity of approximately 51 $mu$Ah/cm$^2$-$mu$m and moreover show excellent discharge capacity retention of 90％ after 100 cycles. An amorphous (Li, La)TiO$_3$ solid electrolyte is possible for application to solid electrolyte for all-solid-state lithium thin film battery below 1 $mu$m. |
| Key words:
Pulsed laser deposition, (Li, La)$TiO_3$, solid electrolyte, $LiCoO_2$ cathode, Capacity retention, All-solid-state lithium thin film battery |
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