| 입자 크기가 PZT계 압전 후막의 물성에 미치는 영향 |
| 김동명, 김정석1, 천채일 |
호서대학교 신소재공학과
1호서대학교 신소재공학 |
| Effects of Particle Size on Properties of PZT -Based Thick Films |
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| ABSTRACT |
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Pb(Ni$_$1/3/Nb$_$2/3/)O$_3$-PbZrO$_3$-PbTiO$_3$ thick films were screen-printed on platinized alumina substrates and fired at 800-1000$^{circ}C$. Two kinds of powders with different particle size were prepared by attrition and ball milling methods. Effects of particle size of starting material on the microstructure and electrical properties of the thick films were investigated. Average particle size of attrition milled-powder (0.44 ${mu}$m) was much smaller than that of ball milled-powder (2.87 ${mu}$m). Average grain size of the thick film prepared from attrition-milled powder was smaller than that of the thick film prepared from ball-milled powder at the sintering temperature of 800$^{circ}C$. However, the difference in average particle size became smaller with increasing the sintering temperature. Thick films prepared from attrition-milled powders showed more uniform and denser microstructures at all firing temperatures. Thick films prepared from attrition-milled powders had better electrical properties at the firing temperature above 900$^{circ}C$ than thick films prepared from ball-milled powders. Dielectric constant, remanent polarization and coercive field of the thick film prepared from attrition-milled powders and fired at 900$^{circ}C$ were 559, 16.3 ${mu}$C/cm$^2$, and 51.3 kV/cm, respectively. |
| Key words:
PNN-PZT, Thick film, Screen printing, Piezoelectric, Particle size |
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