| 빗살형 전극을 이용한 적층 세라믹 박판 작동층 IDEAL의 설계/제조/성능시험 |
| 이제동, 박훈철1, 구남서1, 윤영수2, 윤광준 |
건국대학교 기계항공공학부 항공우주공학전공
1건국대학교 기계항공공학부 항공우주공학전
2건국대학교 신기술융합학 |
| Design/Manufacturing/Performance-Test of Stacked Ceramic Thin Actuation Layer IDEAL Using Interdigitated Electrodes |
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| ABSTRACT |
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This paper is concerned with the development of stacked ceramic thin actuation layer IDEAL (InterDigitated Electrode Actuation Layer) using d$_{33}$ actuation mechanism of piezoelectric ceramic. Most of the thin piezoelectric actuators are operated with d$_{31}$ actuation mechanism. Many kinds of piezoelectric ceramic actuators are strived now to improve the actuation performance. One of efforts to improve performance of piezoceramic actuators is the research trying to develop an actuator using the piezoelectric coefficient d$_{33}$ . The piezoelectric coefficient d$_{33}$ is almost twice larger than piezoelectric coefficient d$_{31}$ . Therefore, the induced strain of PZT thin layer with d$_{33}$ 3 actuation mechanism is bigger than that with d$_{31}$ actuation mechanism. The AFC(MIT) and LaRC-MFC$^{TM}$ which is developed by a research team of NASA Langley Research Center used d$_{33}$ actuation mechanism with surface interdigitated electrode to enhance its actuation performance. But their actuation mechanism is not perfect d$_{33}$ actuation mechanism since the interdigitated electrodes are placed at the surface of the actuation layer. In this research, the stacked ceramic thin actuation layer with imbedded interdigitated electrode is designed and manufactured. The actuation strain of stacked ceramic thin actuation layer is measured and compared with the actuation strain of the LaRC-MFC$^{TM}$. The comparison shows that the developed stacked ceramic thin actuation layer can produce 15% more actuation strain than LaRC-MFC$^{TM}$.> TM/. |
| Key words:
Stacked piezoelectric actuator, Piezoelectric coefficient $d_{33}$, InterDigitated Electrode, InterDigitated Electrode Actuation Layer |
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