| $WO_3$-$SnO_2$박막 센서의 가스감지특성 |
| 유광수, 김태송1 |
서울시립대학교 재료공학과
1한국과학기술연구원 마이크로시스템연구센터 |
| Gas-sensing Characteristics of $WO_3$-$SnO_2$Thin-film Sensors |
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| ABSTRACT |
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W $O_3$-Sn $O_2$thin film sensors with approximately 1${mu}{textrm}{m}$ in thickness were fabricated by using a high-vacuum resistance-heating evaporator, were annealed at 50$0^{circ}C$ for 4 hours in air, and then their crystallinities and surface microstructures were analyzed. As results of gas-sensing characteristics to oxidizing gas, N $O_2$, and reducing gas, CO, of 100 ppm, the highest gas sensitivities (S= $R_{gas}$/ $R_{air}$) were the W $O_3$thin-film sensor measured at 25$0^{circ}C$ for N $O_2$(S≒1000) and the Sn $O_2$thin-film sensor measured at 15$0^{circ}C$ to 25$0^{circ}C$ range for CO (S≒0.25), respectively.ely. |
| Key words:
$WO_3$-$SnO_2$, Thin film, $NO_x$, CO |
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