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J. Korean Ceram. Soc. > Volume 38(8); 2001 > Article
Journal of the Korean Ceramic Society 2001;38(8): 761.
새로운 단일 전구체를 이용한 AIN 박막의 제조
최승철, 안창규, 한성환1
아주대학교 재료공학과
1한국과학기술연구원 청정기술센터
Preparation of AlN Thin Film with New Type of Single Precursor
Key words: MOCVD, AlN, Single precursor, c-axis oriented
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