Fabrication of <TEX>$Al/PZT/RuO_2$</TEX> Micro Cantilever System and Computer Simulation of Resonant Characteristics

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J. Korean Ceram. Soc. > Volume 38(7); 2001 > Article

Journal of the Korean Ceramic Society 2001;38(7): 634.

$Al/PZT/RuO_2$ 마이크로 갠틸레버의 제작과 공진 특성 전산모사

정용재, 유웅현, 홍경일, 최덕균, 김태송¹

한양대학교 세라믹공학과
¹한국과학기술연구원 마이크로시스템 연구센터

Fabrication of $Al/PZT/RuO_2$ Micro Cantilever System and Computer Simulation of Resonant Characteristics

Key words: Micro cantilever, Biosensor, Simulation, ANSYS, Resonance characteristics

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