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J. Korean Ceram. Soc.
>
Volume 37(11); 2000
> Article
Journal of the Korean Ceramic Society 2000;37(11): 1097.
Pt/
$TiO_2$
/
$SiO_2$
/Si 기판 위에 제조된
$YMnO_3$
박막의 강유전 특성에 미치는
${Y_2}{O_3}$
버퍼층의 영향
김제헌, 강승구, 은희태
경기대학교 재료공학과
Effects of
${Y_2}{O_3}$
Buffer Layer on Ferroelectric Properties of
$YMnO_3$
Thin Films Fabricated on Pt/
$TiO_2$
/
$SiO_2$
/Si Substrate
Key words:
${Y_2}{O_3}$
buffer layer
,
$YMnO_3$
thin film
,
MOD
,
Sol-gel
,
Ferroelectricity
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