Effects of Top Electrode Thickness on Ferroelectric Properties of Preferentially Oriented <TEX>$Pb(Zr, Ti)O_3$</TEX>Thin Films

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J. Korean Ceram. Soc. > Volume 36(10); 1999 > Article

Journal of the Korean Ceramic Society 1999;36(10): 1035.

상부전극 두께가 우선방위를 갖는 $Pb(Zr, Ti)O_3$ 박막의 강유전체 특성에 미치는 영향

고가연, 이은구, 이종국, 박진성¹, 김선재²

조선대학교 재료공학과(수송기계부품 공장자동화 연구센터)
¹조선대학교 재료공학과(수송기계부품 공장자동화 연구센터
²한국원자력연구소 원자력재료기술개발팀

Effects of Top Electrode Thickness on Ferroelectric Properties of Preferentially Oriented $Pb(Zr, Ti)O_3$Thin Films

ABSTRACT

Ferroelectric properties and reliability characteristics of(111) and (100) preferentially oriented tetragonal Pb(Zr0.2Ti0.8)O3 (PZT) thin film capacitors have been investigated as a function of the top electrode thickness. The (111) preferentially oriented film exhibits 180$^{circ}$domain switching process with better squareness of hysterisis loop and abrupt change of small singal capacitance-voltage comparing to the (100) preferentially oriented film having 90$^{circ}$ domain switching process. The domain swithcing process of tetragonal phase PZT is different from that of rhobohedral phase. The film with thinner top electrode shows less initial switching polarization due to less compressive stress but it exhibits better endurance characteristics due to enhancing partial switching region.

Key words: Preferred orientation, Ferroelectric thin films, Hysteresis loop, Stress