| $alpha$-Fe$_2$O$_3$ 박막 센서의 환원성 가스감지특성 |
| 이은태, 장건익, 이덕동1 |
충북대학교 재료공학과
1경북대학교 전기전자공학부 |
| Sensing Properties of $alpha$-Fe$_2$O$_3$ Thin Film Gas Sensor to Reducing Gases |
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| ABSTRACT |
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Sensing properties of $alpha$-Fe2O3 thin film to reducing gases such as CHx and CO were systematically examined after deposition on Al2O3 substrate by PECVD(Plasma Enhanced Chemical Vapor Deposition)technique. Microstructure of deposited $alpha$-Fe2O3 thin film showed the porous island structure. This specimen was annealed at 450, 550, $650^{circ}C$ to enhance the gas sensing properties and investigated in terms of CO and C4H10 concentration from 500ppm to 3,000 ppm at operating temperature of 35$0^{circ}C$ The gas sensitivity(%) to C4H10 measured at the operating temperature of 35$0^{circ}C$ was 98.24 (highest sensitivity) 69.51 to CO and 2% to CH4 respectviely. |
| Key words:
$\alpha$-Fe$_2$O$_3$, Sensitivity, Thin film gas sensor, Selectivity |
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