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Journal of the Korean Ceramic Society 1999;36(4): 417. |
화학기상증착 다이아몬드 막의 레이저 평탄화 |
박영준, 백영준 |
한국과학기술연구원 박막기술연구센터 |
Lapping of Chemical Vapor Deposited Diamond Films Using copper Vapor laser |
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ABSTRACT |
Laser lapping of diamond films is performed with focused beam of copper vapor laser. Both spherical and rod-shape laser beam are used. Diamond surface is scanned at various scan speeds(0,125, 0.5, 0.75 mm/sec) and baem shifts (5, 10, 20, 40, 100$mutextrm{m}$) At 0.125 mm/sec 10$mutextrm{m}$ scan condition the level difference of di-amond surface of about 700$mutextrm{m}$ over 20 mm is reduced to 200$mutextrm{m}$ In addition surface roughness is also im-proved from 3.53$mutextrm{m}$ to 2.47$mutextrm{m}$ at 5$mutextrm{m}$ beam shift. But at higher beam shift than 10$mutextrm{m}$ laser scan makes the surface rougher which is considered to be due to the non uniform spatial distribution of laser en-ergy. It is concluded that homogenized laser beam with high average power is needed for large area laser lapping of diamond films at appreciable rates. |
Key words:
Laser lapping, Diamond films, Coper vapor laser |
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