Electrical properties of layered <TEX>$BaTiO_3$</TEX> thin film

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J. Korean Ceram. Soc. > Volume 34(2); 1997 > Article

Journal of the Korean Ceramic Society 1997;34(2): 181.

적층구조 $BaTiO_3$ 박막의 전기적 특성

송만호, 윤기현

연세대학교 세라믹 공학과

Electrical properties of layered $BaTiO_3$ thin film

ABSTRACT

The layered BaTiO3 thin films with a high dielectric constant of polycrystalline BaTiO3 and a good in-sulating property of amorphous BaTiO3 were prepared. And their electrical properties were characterized with stacking methods. The BaTiO3 thin films were prepared by rf-magnetron sputtering technique using a ceramic target on Indium-doped Tin oxide coated glasses. A new stacking method resulted in higher dielec-tric constant, capacitance per unit area, and breakdown strength than those prepared by a conventional stacking method; the new method continuously decrease the substrate temperature after initial deposition of a polycrystalline BaTiO3 layer. The observed high dielectric constant could be explained only by a mul-tilayered amorphous/microcrystalline/polycrystalline structure, which was confirmed indirectly by AES depth profile.

Key words: Layered $BaTiO_3$ thin film, New stacking method, Multilayered structure