Fabrication and Gas-Sensing Characteristics of <TEX>$NO_x$</TEX> Sensors using <TEX>$WO_3$</TEX> Thin Films

,; ,; ,; ,; ,; ,

J. Korean Ceram. Soc. > Volume 32(12); 1995 > Article

Journal of the Korean Ceramic Society 1995;32(12): 1369.

$WO_3$ 박막을 이용한 $NO_x$ 센서의 제조 및 가스감도 특성

유광수, 김태송¹, 정형진¹

서울시립대학교 공과대학 재료공학과
¹한국과학기술원 세라믹스연구부

Fabrication and Gas-Sensing Characteristics of $NO_x$ Sensors using $WO_3$ Thin Films

ABSTRACT

The WO3 thin-film NOx sensor which is of practical use and includes the heater and the temperature sensor was fabricated. The WO3 thin films as a gas-sensing layer was deposited at ambient temperature in a high-vacuum resistance heated evaporator. The highest sensitivity of the WO3 thin-film sensor to NOx was obtained under the condition of the annealing temperature of 50$0^{circ}C$ and the operating temperature of 30$0^{circ}C$. The gas sensing characteristics of this sensor was excellent, i.e. high sensitivity (Rgas/Rair in 3 ppm NO2=53) and fast response time (4 seconds).

Key words: $NO_x$ sensor, $WO_3$ thin film, Gas sensor